so this study adopts the small hole conductance method
更新日期:2021-11-11     浏览次数:85
核心提示:The study first used the static boost method to test, but because the measured vacuum is too large and the calculated data has a large devia

The study first used the static boost method to test, but because the measured vacuum is too large and the calculated data has a large deviation, the static boost method is abandoned. The orifice conductance method is to place a sample of the material to be tested in a vacuum container, use a small hole with a known flow conductance to pump air, and measure the dynamic equilibrium pressure. The outgassing rate of the material is calculated according to the conductance of the small hole under the molecular conductance and the pressure difference between the two sides of the small hole. This method can avoid errors caused by the re-adsorption of gas molecules on the container wall, so this study adopts the small hole conductance method.